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Cryopump

1. Overview
Vacree Technologies Co., Ltd. has more than 30 years' history in R&D and production of cryogenic vacuum products. It has passed ISO9001 quality management system certification for cryocoolers and cryopumps. The CP series cryopumps have been used by many domestic manufacturers of semiconductors and IC, and they have played an important role in production of microelectronics industry, high-energy physics installations, space simulation equipments and other industrial products.

2. Feature:
• Real oil-free cryopump: to obtain and maintain vacuum using cryogenic plate to condensate and adsorb gas, clean and pollution-free;
• Fast Pumping speed: fast pumping speed especially for H2O、H2,  etc. Thus the exhaust velocity is faster than that of other cryopumps, which improves the product output greatly;
• Low operating cost: only electricity and cooling water is needed during runtime, while liquid nitrogen and other cryogenic liquids don't be needed, which makes the operation simple and convenient;
• Strong adaptability: there are not moving parts in vacuum chamber, thus the interference from outside or particles from the vacuum system will not affect the work of cryopump;
• The cryopump is able to be installed in any orientation;
• Fewer moving parts and low-speed operation make service life longer;
• All types of cryopumps can reach the limit degree of vacuum 10-7 Pa, and some special varieties of cryopumps can achieve 10-9 Pa.

3. Technical specifications for standard-diameter cryopump:
   

Model

CP200

CP200N

CP250

CP300

CP400

CP500

Pumping speed

(l/s)

For H2O

4200

4200

6500

9000

16000

30000

For Air

1500

1500

2300

3000

6000

10000

For H2

2500

2500

2500

5000

5000

13000

For Ar

1200

1200

1900

2500

5000

8500

For He

750

750

1100

2300

2500

5500

Capacity  (Std.l)

For N2/ Ar

1000

1000

2000

2000

2500

3200

For N2/He

18

15

25

25

20

20

Throughput

scc/min)

For Ar

700

700

1200

1500

500

790

Cooling down time to 20K(min)

≤ 90

≤ 90

≤ 90

≤ 90

≤ 150

≤ 180

Inlet flange

ANSI 6in.

ANSI 6in.

ANSI 10in.

ANSI 12in.

ANSI 16in.

ANSI 20in.

CF 10 in.

CF10in.

CF12in.

CF14in.

 

 

ISO200mm

ISO200mm

ISO250mm

ISO320mm

ISO400mm

ISO500mm

 

4. Technical specifications for large-diameter cryopump

Model

CP800

CP900LN

CP1200LN

Pumping speed(l/s)

For H2O

70000

80000

150000

For H2

20000

23000

34000

For Ar

20000

23000

32000

For N2

25000

30000

45000

Capacity (Std.l)

For N2/Ar

7500

5000

6000

For H2/He

20

20

30

Ultimate pressure (Pa)

1 ×10``

1 ×10``

1 ×10``

Cooling down time to 20K (min)

240

240

240

LN2 Consumption(L/Hr)

-

13

16

Inlet flangemm)

Ø800

Ø900

Ø1188

Weight (Kg)

350

350

500

Vacree provides customized cryopumps according to customers’ requirement.

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Our Cryopump manufacturers has Cryopump for sale, and these Cryopump are from China with high quality and exported to the foreign countries.

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